Analysis plugin

Analysis plugin allows, for given sources, aperture and image planes, to calculate:

• Spot diagram
• Distortion diagram
• Current density profile
• Current density profile including difraction on aperture (even polychromatic)
• Edge response

Publications

On the Calculation of SEM and FIB Beam Profiles, Kološová, J; Hrnčíř, T; Jiruše, J; Rudolf, M; Zlámal, J, Microscopy and Microanalysis, 2015

Spot diagram of 9 point sources and distortion

Current density contours of 9 point sources and distortion

 

 

3D current density profile displayed in EXCEL

 

 

Point spread function (PSF) at different defocus values