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Analysis plugin
Spot diagrams - distortion
Current density of spot
3D current density profile
Point spread function
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Analysis plugin

Analysis plugin allows, for given sources, aperture and image planes, to calculate:

  • Spot diagram
  • Distortion diagram
  • Current density pro file
  • Current density pro file including di fraction on aperture (even polychromatic)
  • Edge response

Publications

On the Calculation of SEM and FIB Beam Profiles, Kološová, J; Hrnčíř, T; Jiruše, J; Rudolf, M; Zlámal, J, Microscopy and Microanalysis, 2015


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