EOD (Electron optical design) - software for design of charged particle optics devices
- EOD is program integrating Software for Particle Optics Computations (SPOC) programs MLD, ELD, MMD, EMD and TRC
- EOD is based on potential computation with well-established first order finite element method, allowing to solve the 2D potential with high accuracy
- EOD is a complete environment with interface for the input of FEM data, input of data for optical computations and ray tracing, and graphical output of computation results
- EOD is a Windows© program with CAD-like look
- The user interface enables the input of data with complicated geometry and the solution of complex electron and ion optical problems in EOD
Electric and magnetic field computation
- Saturated magnetic electron lenses of complicated geometry - (built in error estimation)
- Saddle or toroidal deflectors inside magnetic lenses
- Electrostatic lenses (with dieletrics) - (built in error estimation)
- Electrostatic and magnetic multipoles
- Tolerancing analysis of electrostatic and magnetic lenses
- Import of fields calculated outside EOD possible
Optical properties computation
- Optical properties – including aberration coefficients – with high accuracy
- Signal electron ray paths
- Optimizations
- Output of field and particle data along trajectory and at selected planes
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